Monarc

MONARC: REDEFINING WHAT'S POSSIBLE IN CATHODOLUMINESCENCE MICROSCOPY

Picture6 Picture7

The new Monarc CL detector is the solution to challenges in SEM-based cathodoluminescence (CL) such as:

  • Limited ability to analyse the emitted light
  • Must compromise between quality and time-to-data
  • Restricts correlation of the CL signal with your sample structure
  • Must be an expert operator in many cases

Monarc 4

Materials that emit CL: minerals, gem stones, semiconductors, electronics, starchy foods, stains, oxides, glass, and some polymers and organic materials.

The new Monarc CL detector features:

  • Ultra-smooth collection mirror with a high numerical aperture (NA)
  • High-performance stages align the ample, mirror and e-beam with precision under automated software control
  • Permanently aligned optical system with beam shaping optics to perfectly match NAs
  • Achromatic spectroscopy coupling for ultimate performance in vacuum UV to mid-infrared
  • Advanced f/3.88 Schmidt-Czerny-Turner spectrograph offers >5x improved spectral resolution
  • Virtually aberration free spectrograph enables angle-resolved capability with 400x larger FOV
  • Simultaneous measurement of angle and wavelength enabled by Monarc’s unique optomechanical design
  • Latest high-performance photon detectors, maximizing the signal from every photon for fastest data collection
  • All-new software program with streamlined-control and recipe-driven acquisition

Monarc 2

The new Monarc CL detector has these unique advantages:

  • Fastest time to the best data
  • Easy operation for all users
  • Most accurate correlation with other signals

Monarc

Let's take the leap from here…

 Picture4 Picture5

... to faster, more precise, and more accurate CL specimen analysis!

Specifications

Model

Mode

Monarc Pro

Monarc

Unfiltered CL mapping

1

1

Wavelength-filtered CL mapping

1

1

Wavelength-scanned CL spectroscopy

1

1

Wavelength-resolved CL spectroscopy

1

1

Wavelength-filtered CL spectrum imaging (SI)

1

1

Wavelength-resolved CL SI

1

1

Angle-resolved CL pattern

1

Angle-resolved CL SI

1

Wavelength- and angle-resolved CL spectroscopy

1

Polarization-filtered CL

1

Feature

Wavelength range

185 – 2300 nm1

300 – 800 nm

Virtually aberration-free spectrograph

1

Wavelength resolution

0.1 nm

0.5 nm

SI pixel rate, max.

6000 pixels/s

6000 pixels/s

Field of view

Up to 10,000 μm2

10,000 μm2

Expert results for all users

1

1

Reproducible results in the short-and long-term

1

1

Recipe-driven operation and analysis

1

Use with in-lens SEM detectors

1

The specifications provided herein are approximate and are intended as guidelines only. All specifications are subject to change.
1 Specification requires appropriate options.